| 6297 |
Four-point probe mapping system 四點探針 |
Four Dimensions, Inc. |
280 SI |
四點探針檯 : 半導體層、雜質擴散層或離子佈植層電阻係數的量測及繪圖。利用兩點電流兩點電壓量測薄膜或矽晶圓之表面片電阻。
Vintage:2003
The for point probe, 4pp Model 280 CI with auto-mapping function, is the instrument to measure the sheet resistance of the silicon chip . It is a versatile tool to measure the sheet resistance of the epi layer, chip surface with ion implantation and the thin metal layer.
Wafer or square wafer maximum size:8" wafer or 6" x 6" square wafer Sheet resistance range:1mΩ/square ~ 800KΩ/square |
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