| 3599 |
Wafer Geometry Gauge |
E+H (Eichhorn + Hausmann ) |
MX 208 |
* 晶圓表面檢查, 檢查晶圓表面厚度, 平坦度
* For 8"Wafer. 全自動.
* Contactless distance measurement using capacitive sensors
* Resolution 0.1 micronmeters
* Mathematical simulation of a vacuum chuck
* Measuring time per wafer: max. 15 secs
* Wafer at rest during measurement
* Serial interface RS232
* Evaluation- and data base software for PCs included
* Automatic data conversion (ASC II/ dBase III)
* Quick and easy recalibration |
1 |
inquire |
|