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| ID | Function | OEM | Model | Description | Qty |
Price | Status |
| 6101 | Spin Coater Developer | DNS | CST-SCD 632BP | T1:Lithography(Puddle)->rinse->post->bake T2:HMDS->coating->EBR->pre->back T3::Lithography(Spray)->rinse T1,T2:4"~6" wafer T3:10cmx10cm glass A.off line 目前此機台已離開生產線。 B.thermal controller is not working. 離線前的問題: 恆溫器故障。 C.Inspection available 可驗機 |
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Contact for this equipment: sales@semicon-equip.com
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