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OEM
Model
Function
Description
Agilent
4155C
Semiconductor Parameter Analyzer, 半導體參數
半導體參數分析儀, still in Clean room
HANYANG
.
氣瓶櫃
2001/10/15
Gas Keeper 2000 cabinet 2 Cylinder type
拓技
.
Solvent Wet Bench
2000/6/30
150cm*90*215
拓技
.
Clean Wet Bench
2000/6/30
270cm*220*120
和立
.
Annealing Furnace
80cm*200*140 6" 1 set
70cm*195*130 4" 1 set
FULINTEC
.
Sputter
2002/3/11
EBARA
A150WT
pump
-
Brooks
MTR-5
Robotic 自動化機械手臂
was Used in Novellus sysem.
Thermo Nicolet NEXUS
670
FT-IR 紅外線光譜儀
傅立葉紅外線光譜儀
In clean room.
With Pike 300 mapping system.
Cascade
RF-1
Probe station 微電流電壓量測平台
In clean room.
MECS
UTX1000PZ
Robot
spare robot in a WJ-999 system, 6" configured, last work in Dec, 09.
Kawasaki
JS 30
Robotic 自動化機械手臂
Yaskawa
K 3
Robotic 自動化機械手臂
Fully functional 功能正常
Yaskawa
SK 16
Robotic 自動化機械手臂
Fully functional 功能正常
Rudolph
FOCUS FE III (3)
Ellipsometer 膜厚量測
in clean room
Agilent
33250A
Waveform Generator
80Mhz Function Arbitrary Waveform Generator
Olympus
MX 50
Microscope
Fully functional.
Inspection and test available.
Eyepiece: 10x
Object: 5x, 10
Advantest
T5771
Memory Test
T5771 Front-end Flash Memory Test System. With the ability to simultaneously tes
Olympus
Measuring Microscope
Microscope
工具顯微鏡, 量測顯微鏡, 金相顯微鏡
Brooks-CTI
On-Board
Water Pump
Brand New,
Crated.
P/N 8120665G001
Including manual, and parts.
Four Dimensions
CVmap 92 A
Mercury Probe Systems (汞探針、水銀探針量
Uses a mercury probe to make contact to the wafer-under-test for C-V(Capacitance
Mitutoyo
Surftest
surface analyzer 表面粗糙度分析
含震動桌
With Vibration Table.
Currently in use (工作中)。
AB-M
-
Mask Aligner
8" 方形光源,大面積曝光。
電源供應器+光源。
可使用350W~500
Delta Technologies
-
3D Profiler 轮廓仪
輪廓儀
Currently in use (工作中)。
Branchy Vacuum Technology
P 200
ICP ion etcher 蚀刻机
Inductively Coupled Plasma Reactive Ion Etching
電漿離子蝕刻機
Currentl
OAI
350 NUV
Mask Aligner 曝光機
Currently in use (工作中)。
Mirror 350 440 NM.
Senser 365 400 NM.
6" Wafe
Fanuc
LRMAte 200i
Robot
with RJ3 controller, less than 1 year old, this is a working robot with all the
Olympus
Olympus
X Y Table, LCD, Glass Inspection
X Y Table,
Manual(手動)
with backlit (枱面含背光),
with Olympus Micr
AB-M
Mask Aligner
Mask Aligner
6" Wafer, UV, NUV Mask Aligner 紫外線 曝光機
SMIC
SNR 615
SMT Reflow
ECO REFLOW SNR-615
迴焊爐
ADE
9500, 9700
Wafer Gauge 晶圓檢測
ADE 9700 :
ASC 2000 電腦
E Plus 測試平台
E+H (Eichhorn + Hausmann )
MX 208
Wafer Geometry Gauge
* 晶圓表面檢查, 檢查晶圓表面厚度, 平坦度
* For 8"Wafer. 全自
Agilent
8656B
Signal Generator
100KHz to 990MHz Signal Generator
Agilent
8751A+87511B
Network Analyzer
5Hz to 500MHz Network Analyzer + S-parameter Test Set
Agilent
8924C
1000MHz CDMA Mobile Station
1000MHz CDMA Mobile Station
Anritsu
ME520B
Digital Transmission Analyzer
Digital Transmission Analyzer
Tektronix
2715
CATV Spectrum Analyzer
CATV Spectrum Analyzer
Agilent
8591A-001
Spectrum Analyser
1.8GHz Spectrum Analyzer
Advantest
R3131A
Spectrum Analyser
9KHz~3GHz Spectrum Analyzer
Cascade
A-200M2
Summit 12101 8in 半自動探針檯
vintage: 2003
Quesant
250
掃描探針顯微鏡 AFM Scanning Probe Microscop
vintage: 2003
Nikon
NSR-2005i9C
NSR Stepper 次微米曝光機, 步進機
年份 vintage: 1993
INCLUDING 1SET BSR2005i9C NIKON NSR-2005i9C
Four Dimensions, Inc.
280 SI
Four-point probe mapping system 四點探針
四點探針檯 : 半導體層、雜質擴散層或離子佈植層電阻係數
Mactronix
HZN-425P5 & Special Cutter
晶片轉換機
for 4" Wafers.
Vintage: 2002
Sillner
IPS432
Packaging
千謄
BOE-4T15
Etcher 濕蝕刻設備
千謄
KOH-6T20
Etcher 濕蝕刻設備
Leybold
40BCS
Pump
Genmark
Robot GB4
wafer handling
Robot+Controller+Cables;
Sold "As-Is, Where Is"
Nikon
NSR 1505i6A
Stepper
vintage 年份: 1989。
Off line已離線。
志聖 c Sun
UV-322
UV curve
UV curving equipment
UV 乾燥爐
Nikon
Optiphot 66
microscope 金相顯微鏡
-
Olympus
BX-60
microscope 金相顯微鏡
Object:
5x BD (Bright field and Dark field)
10x BD
25x BD
50x BD
100x BD
Veeco
NT3300
Optical Profiler (光學輪廓儀)
測量也可以直接進行於生產過程監控。開動結合強大的WYKOVisi
Agilent
86112A 20Ghz module
-
-
Agilent
86130A serial BERT
-
-
Agilent
86100A mainframes
-
Tektronix
AWG610
Arbitrary Waveform Generator
-
DNS
CST-SCD 632BP
Spin Coater Developer
T1:Lithography(Puddle)->rinse->post->bake
T2:HMDS->coating->EBR->pre->back
T3:
EBARA
A150W-M
Dry Vacuum Pump
Very low nitrogen consumption for purging
· Clean room compatible
· Low se
Quintel (Neutronix-Quintel)
Q2001
Mask Aligner
Q2001 Mask Aligner, on line
semi-auto
Lamp: 200mW
Intensity: 17mW(g,h,i-Light
Dainippon Ink
eFlow 2000
-
-
Sankyo Seiki
SC 3000
Robot Controller
look like new, not tested. 外觀很新,沒有測試過。
Brooks
Robot Controller
Robot Controller
Part No: 600021267SP
Probing Solution Inc.
PSI 400
-
Eyepiece:10x.or 20x.or30x.
Object: 60x.
Olympus
BHT
Microscope
-
Brooks
MTR-5
pn:001-7600-07
arm pn:001157097
HP Agilent
82350B
PCI-GPIB Card
high-performance IEEE-488 interface and software for 5v PCI-base
ADE
9xxx
LAN
LAN
Solid State Measument
5100
CV System
Off-Line, still in clean room
filmetrics
F-20
Film thickness measurement (膜厚量測)
FILMETRICS can measure the thickness, n, k values and roughness up to 4 layersth
ADE
350
Robot Controller
this Controller is fully tested.
compatible with Single and Dual end effector.
Guide Tech
Femto 2000
Time Interval Analyzer (TIA)
Can be integrated with Tyradyne and Advantest. Revision 2.3,Win NT4.0,
There ar
AMAT
P5000
*AMAT P-5000 mainframe
*3 Oxide Etch Chamber
*All UNIT MFC – CF4 /CHF3 /O2 /
ADE
ASC
Computer
Computer ONLY,
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