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OEM
Model
Function
Description
KLA-Tencor
AWIS Constellation
Wafer Inspection
Not tested, sold as parts machine, Main frame, Robots are there.
KLA-Tencor
CRS-3100
Optical Review
Parts machine with missing parts, and without SMIF,
ADE
9600
Wafer Inspection (晶圓檢測測)
1. Single Robot
2. Input Station X2 、Output Station X3
3. Station OPEN/CLOS
Nikon
Optiphot 200
Microscope 金相顯微鏡
5x.10x.20x.50x.100x.
6吋、8吋晶圓檢查
Yaskawa
ERCR - CSL22000-RA00
TFT LCD Robot
Year 2007, by YASNAC XRC.
As-Is, Where-Is, 現況出售
Brooks
Magnatran 7 (Mag 7)
Wafer Transfer Robot
Brooks Magnatran 7 Robot with end-effector and with Power distribution.
ADE
350
Robot Arm and Controller
ADE Robot and Controller, Refurbished.
for ADE 9300/9600/9650
ADE 機械臂含
Rucker & Kolls
660J
Probing Station
Manual Probing Station
手動探針臺
Tenco
P15
profiler
good condition, still working /on line.
Brooks
ATM-405
Robot
200mm and 300mm wafer robot.
No controller to test the robot, sold As-Is.
DNS
SKG-450-AV
Spin coater
塗佈設備
AKT
1600-PECVD
PECVD
PECVD 機, LCD 製程。
FOI
Stella
Etcher 蚀刻
Brand new 300 mm Etcher
12 吋蝕刻機 (全新)
RION
KL 25
Particle Counter
微粒子測試 (液態)
Leica
INM 100
Microscope
Tested, Fully Operational.
Nikon
Optiphot 88
Microscope
Vintage:2000
Tested, Fully Operational.
for 8" wafer.
5x, 10x, 20x, 40x, 100x
展力
SR-S21052
環境測試機
環境控制室
ALPHA
MS-5000A
IC memory tester
-
Nanofocus
microScan AF2000
非接觸式三次元量測儀
3D non-contact surface measurement.
利用二極體雷射進行表面3D量測:
HANYANG
.
氣瓶櫃
2001/10/15
Gas Keeper 2000 cabinet 2 Cylinder type
拓技
.
Solvent Wet Bench
2000/6/30
150cm*90*215
FULINTEC
.
Sputter
2002/3/11
EBARA
A150WT
pump
These 2 pumps are sold as-is, you will need to replace parts before put to work,
Brooks
MTR-5
Robotic 自動化機械手臂
was Used in Novellus sysem.
MECS
UTX1000PZ
Robot
spare robot in a WJ-999 system, 6" configured, last work in Dec, 09.
There is n
Rudolph
FOCUS FE III (3)
Ellipsometer 膜厚量測
in clean room
Agilent
33250A
Waveform Generator
80Mhz Function Arbitrary Waveform Generator
Olympus
Measuring Microscope
Microscope
工具顯微鏡, 量測顯微鏡, 金相顯微鏡
AB-M
-
Mask Aligner
8" 方形光源,大面積曝光。
電源供應器+光源。
可使用350W~500
Delta Technologies
-
3D Profiler 轮廓仪
輪廓儀
Currently in use (工作中)。
Branchy Vacuum Technology
P 200
ICP ion etcher 蚀刻机
Inductively Coupled Plasma Reactive Ion Etching
電漿離子蝕刻機
OAI
350 NUV
Mask Aligner 曝光機
Currently in use (工作中)。
Mirror 350 440 NM.
Senser 365 400 NM.
6" Wafe
Sillner
IPS432
Packaging
千謄
BOE-4T15
Etcher 濕蝕刻設備
千謄
KOH-6T20
Etcher 濕蝕刻設備
Leybold
40BCS
Pump
Genmark
Robot GB4
wafer handling
Robot+Controller+Cables;
Sold "As-Is, Where Is"
Nikon
NSR 1505i6A
Stepper
vintage 年份: 1989。
Off line已離線。
Nikon
Optiphot 66
microscope 金相顯微鏡
-
DNS
CST-SCD 632BP
Spin Coater Developer
T1:Lithography(Puddle)->rinse->post->bake
T2:HMDS->coating->EBR->pre->back
T3:
Quintel (Neutronix-Quintel)
Q2001
Mask Aligner
Q2001 Mask Aligner, on line
semi-auto
Lamp: 200mW
Intensity: 17mW(g,h,i-Light
Dainippon Ink
eFlow 2000
-
-
Brooks
Robot Controller
Robot Controller
Part No: 600021267SP
Probing Solution Inc.
PSI 400
-
Eyepiece:10x.or 20x.or30x.
Object: 60x.
Olympus
BHT
Microscope
-
ADE
9xxx
LAN
LAN
ADE
350
Robot Controller
this Controller is fully tested.
compatible with Single and Dual end effector.
Guide Tech
Femto 2000
Time Interval Analyzer (TIA)
Can be integrated with Tyradyne and Advantest. Revision 2.3,Win NT4.0,
There ar
AMAT
P5000
*AMAT P-5000 mainframe
*3 MxP, Oxide Etch Chamber
*All UNIT MFC – CF4 /CHF3
ADE
ASC
Computer
Computer ONLY,
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